作者单位
摘要
1 中国电子科技集团公司第十三研究所, 河北石家庄 050051
2 固态微波器件与电路全国重点实验室, 河北石家庄 050051
介绍了一款基于 GaAs肖特基二极管单片工艺的 220 GHz倍频器的设计过程以及测试结果。为提高输出功率, 倍频器采用多阳极结构, 8个二极管在波导呈镜像对称排列, 形成平衡式倍频器结构。采用差异式结电容设计解决了多阳极结构端口散射参数不一致问题, 提高了倍频器的转换效率和工作带宽。对设计的倍频器进行流片、装配和测试, 测试结果显示: 倍频器在 204~ 234 GHz频率范围内, 转化效率大于 15%; 226 GHz峰值频率下实现最大输出功率为 90.5 mW, 转换效率为 22.6%。设计的 220 GHz倍频器输出功率高, 转化效率高, 工作带宽大。
倍频器 太赫兹 肖特基二极管 结电容 单片 frequency doubler tearhertz Schottky barrier diode junction capacitance Microwave Monolithic Integrated Circuit 
太赫兹科学与电子信息学报
2023, 21(9): 1080
作者单位
摘要
1 河北省产品质量监督检验研究院, 河北 石家庄 050000
2 电子科技大学, 四川 成都 610000
3 中国电子科技集团公司第十三研究所, 专用集成电路国家级重点实验室, 河北 石家庄 050000
针对太赫兹通信及成像等系统对高集成度射频收发链路的需求, 在自主研制的太赫兹肖特基二极管的基础上, 建立了器件的精确模型, 设计并制备出基于二极管的倍频/混频单片集成芯片, 解决了传统二极管装配难度大、一致性差的难题, 提高了器件的性能。成功研制出170 GHz、340 GHz倍频器和340 GHz混频器模块, 并且开发出集成化的340 GHz发射与接收链路。发射端一体化模块实现了342 GHz功率为22 mW的输出, 接收端一体化模块实现了330~350 GHz单边带变频损耗在10 dB上下。该模块的开发为未来太赫兹通信及成像技术的应用奠定基础。
半导体器件 太赫兹肖特基二极管 倍频器 混频器 收发链路 semiconductor device terahertz Schottky diode frequency multiplier mixer transceiver link 
量子电子学报
2023, 40(3): 369
Author Affiliations
Abstract
National Key Laboratory of ASIC, Hebei Semiconductor Research Institute, Shijiazhuang 050051, China
In this work, high-stability 4H-SiC avalanche photodiodes (APDs) for ultraviolet (UV) detection at high temperatures are fabricated and investigated. With the temperature increasing from room temperature to 150°C, a very small temperature coefficient of 7.4 mV/°C is achieved for the avalanche breakdown voltage of devices. For the first time, the stability of 4H-SiC APDs is verified based on an accelerated aging test with harsh stress conditions. Three different stress conditions are selected with the temperatures and reverse currents of 175°C/100 µA, 200°C/100 µA, and 200°C/500 µA, respectively. The results show that our 4H-SiC APD exhibits robust high-temperature performance and can even endure more than 120 hours at the harsh aging condition of 200°C/500 µA, which indicates that 4H-SiC APDs are very stable and reliable for applications at high temperatures.
silicon carbide photodiode UV detector high temperature avalanche Geiger mode 
Chinese Optics Letters
2023, 21(3): 032502
杨大宝 1张立森 1,2徐鹏 1赵向阳 1[ ... ]冯志红 1,2,*
作者单位
摘要
1 中国电子科技集团公司第十三研究所,河北 石家庄 050051
2 专用集成电路国家级重点实验室,河北 石家庄 050051
基于最新研制的小阳极结反向并联肖特基二极管芯片,设计和制造了320~360 GHz固定调谐分谐波混频器。混频器的结构采用的是传统电场(E)面腔体剖分式结构:将二极管芯片倒装焊粘在石英基片上,再用导电银胶将石英电路悬置粘结在混频器下半个腔体上。电路设计采用场路相结合的方法:用场仿真软件建立混频电路各个功能单元的S参数模型,将它们代入非线性电路仿真软件中与二极管结相结合进行混频器性能整体仿真优化。最终测试结果表明,谐波混频器的双边带在4~6 mW的本振功率驱动下,在320~360 GHz超过12%带宽范围内,双边带变频损耗均小于9 dB;混频器在310~340 GHz频带范围内,双边带噪声温度最低为780 K。声温度最低为780 K。
固定调谐 谐波混频器 反向并联 变频损耗 fixed-tuned sub-harmonic mixer anti-parallel conversion loss 
红外与激光工程
2022, 51(12): 20220168
Author Affiliations
Abstract
1 Terahertz Science and Technology Research Center, University of Electronic Science and Technology of China, Chengdu 610000, China
2 College of Materials Science and Engineering, Sichuan University, Chengdu 610065, China
3 National Key Laboratory of Application Specific Integrated Circuit, Hebei Semiconductor Research Institute, Shijiazhuang 050051, China
4 Key Laboratory of Nanodevices and Applications, Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences, Suzhou 215123, China
5 Yangtze Delta Region Institute (HuZhou), University of Electronic Science and Technology of China, Huzhou 313001, China
Metasurfaces have powerful light field manipulation capabilities and have been researched and developed extensively in various fields. With an increasing demand for diverse functionalities, terahertz (THz) metasurfaces are also expanding their domain. In particular, integrating different functionalities into a single device is a compelling domain in metasurfaces. In this work, we demonstrate a functionally decoupled THz metasurface that can incorporate any two functions into one metasurface and switch dynamically through external excitation. This proposed metasurface is formed by the combination of split-ring resonators and phase change material vanadium dioxide (VO2). It operates in the single-ring resonant mode and double-ring resonant mode with varying VO2 in insulating and metallic states, respectively. More importantly, the phase modulation is independent in two operating modes, and both cover a 360° cross-polarized phase with efficient polarization conversion. This characteristic makes it obtain arbitrary independent phase information on the metasurface with different modes to switch dual functions dynamically. Here, we experimentally demonstrate the functions of a tunable focal length and large-angle focus deflection of a THz off-axis parabolic mirror to verify the dual-function switching characteristics of the functionally decoupled metasurface. The functionally decoupled metasurface developed in this work broadens the way for the research and application of multifunctional modulation devices in the THz band.
Photonics Research
2022, 10(9): 2008
作者单位
摘要
1 中国电子科技集团公司 第十三研究所,河北 石家庄 050051
2 专用集成电路重点实验室,河北 石家庄 050051
基于六阳极结反向串联型砷化镓平面肖特基容性二极管,采用平衡式二倍频器结构,成功研制出一种大功率150?GHz二倍频器。使用三维电磁场与非线性谐波平衡联合仿真方法,提高了仿真结果和实际的吻合度,并根据设计结果完成倍频器的加工、装配和测试。倍频器在输出频率为146~158?GHz下的倍频效率达到7%以上;在输出频率为154?GHz时,倍频效率达到12%,输出功率达到71?mW。
太赫兹 二倍频 肖特基二极管 大功率 Terahertz frequency doubler Schottky varactors high power 
太赫兹科学与电子信息学报
2020, 18(2): 171
Author Affiliations
Abstract
National Key Laboratory of Application Specific Integrated Circuit (ASIC), Hebei Semiconductor Research Institute, Shijiazhuang 050051, China
Ga2O3 metal–oxide–semiconductor field-effect transistors (MOSFETs) with high-breakdown characteristics were fabricated on a homoepitaxial n-typed β-Ga2O3 film, which was grown by metal organic chemical vapor deposition (MOCVD) on an Fe-doped semi-insulating (010) Ga2O3 substrate. The structure consisted of a 400 nm unintentionally doped (UID) Ga2O3 buffer layer and an 80 nm Si-doped channel layer. A high k HfO2 gate dielectric film formed by atomic layer deposition was employed to reduce the gate leakage. Moreover, a source-connected field plate was introduced to enhance the breakdown characteristics. The drain saturation current density of the fabricated device reached 101 mA/mm at Vgs of 3 V. The off-state current was as low as 7.1 × 10-11 A/mm, and the drain current ION/IOFF ratio reached 109. The transistors exhibited three-terminal off-state breakdown voltages of 450 and 550 V, corresponding to gate-to-drain spacing of 4 and 8 μm, respectively.
Journal of Semiconductors
2019, 40(1): 012803
Author Affiliations
Abstract
National Key Laboratory of ASIC, Hebei Semiconductor Research Institute, Shijiazhuang 050051, China
Ultraviolet (UV) detectors with large photosensitive areas are more advantageous in low-level UV detection applications. In this Letter, high-performance 4H-SiC p-i-n avalanche photodiodes (APDs) with large active area (800 μm diameter) are reported. With the optimized epitaxial structure and device fabrication process, a high multiplication gain of 1.4 × 106 is obtained for the devices at room temperature, and the dark current is as low as ~10 pA at low reverse voltages. In addition, record external quantum efficiency of 85.5% at 274 nm is achieved, which is the highest value for the reported SiC APDs. Furthermore, the rejection ratio of UV to visible light reaches about 104. The excellent performance of our devices indicates a tremendous improvement for large-area SiC APD-based UV detectors. Finally, the UV imaging performance of our fabricated 4H-SiC p-i-n APDs is also demonstrated for system-level applications.
040.1345 Avalanche photodiodes (APDs) 040.7190 Ultraviolet 040.6070 Solid state detectors 230.5160 Photodetectors 
Chinese Optics Letters
2019, 17(9): 090401
徐鹏 1杨大宝 1张立森 2梁士雄 2,**[ ... ]冯志红 2,*
作者单位
摘要
1 中国电子科技集团公司第十三研究所,河北 石家庄 050051
2 专用集成电路重点实验室,河北 石家庄 050051
基于反向串联型砷化镓平面肖特基容性二极管,采用平衡式二倍频结构,研制出了一种190 GHz大功率输出二倍频器。使用三维电磁场与非线性谐波平衡联合的方法进行了仿真,并根据仿真结果完成了倍频器的加工、装配和测试。倍频器在182~196 GHz输出频率范围内的倍频效率可达8%以上;当输出频率为187 GHz时,倍频效率和输出功率可分别达到15.4%和85 mW。
太赫兹 二倍频 肖特基二极管 大功率 
中国激光
2019, 46(6): 0614022
Author Affiliations
Abstract
1 Terahertz Science and Technology Research Center, University of Electronic Science and Technology of China, Chengdu 610054, China
2 National Key Laboratory of Application Specific Integrated Circuit, Hebei Semiconductor Research Institute, Shijiazhuang 050051, China
3 Center for Terahertz Waves, College of Precision Instrument and Optoelectronics Engineering, Tianjin University, Key Laboratory of Optoelectronic Information Technology, Ministry of Education, Tianjin 300072, China
This Letter presents a double-layer structure combining a cracked cross meta-surface and grating surface to realize arbitrary incident linear terahertz (THz) wave polarization conversion. The arbitrary incident linear polarization THz wave will be induced with the same resonant modes in the unit cell, which results in polarization conversion insensitive to the linear polarization angle. Moreover, the zigzag-shaped resonant surface current leads to a strong magnetic resonance between the meta-surface and gratings, which enhances the conversion efficiency. The experimental results show that a more than 70% conversion rate can be achieved under arbitrary linear polarization within a wide frequency band. Moreover, around 0.89 THz nearly perfect polarization conversion is realized.
160.3918 Metamaterials 050.2230 Fabry-Perot 260.5430 Polarization 
Chinese Optics Letters
2019, 17(4): 041602

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