1 Terahertz Science and Technology Research Center, University of Electronic Science and Technology of China, Chengdu 610000, China
2 College of Materials Science and Engineering, Sichuan University, Chengdu 610065, China
3 National Key Laboratory of Application Specific Integrated Circuit, Hebei Semiconductor Research Institute, Shijiazhuang 050051, China
4 Key Laboratory of Nanodevices and Applications, Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences, Suzhou 215123, China
5 Yangtze Delta Region Institute (HuZhou), University of Electronic Science and Technology of China, Huzhou 313001, China